The small size of kems device results in a MHz resonant frequency even for a simple flexural mode. The MEMS Module provides a dedicated physics interface for electromechanics that, for MEMS resonators, is used to compute the variation of the resonant frequency with applied DC bias - the frequency decreases with applied potential, due to the softening of the coupled electromechanical system. Compared to capacitive pressure sensors, they are simpler to integrate with electronics, their response is more linear and they are inherently shielded from RF noise.Įvery comwol and every simulation need is different. One such device is the electrostatically controlled micromirror. The Solid Mechanics physics interface is used for stress analysis as well as general linear and nonlinear solid mechanics, solving for the displacements. The MEMS Module includes dedicated physics interfaces for thermal stress computations with extensive postprocessing and visualization capabilities, including stress and strain fields, principal stress and strain, equivalent stress, displacement fields, and more. Thermoelasticity is important in the modeling of high-quality factor MEMS resonators. Pull-in Voltage for a Biased Resonator-3D. A surface acoustic wave SAW is an acoustic wave propagating along the surface of a solid material. You can easily perform lumped parameter extraction of capacitance, impedance, and admittance, and connect to external electrical comwol via SPICE netlists. The thermal stress in a layered plate is studied in this example.

Consequently, software specifically designed for MEMS simulation and modeling has never been more important. The plating process can control this stress even for similar materials.

You mes include a variety of damping phenomena in your model: One of the important properties of the AT cut is that the resonant frequency of the crystal is temperature independent to first order. Squeeze-Film Gas Damping of a Vibrating Disc This benchmark model computes the total force acting on a vibrating disc in the frequency and time domains and compares both results with expressions derived analytically. Thermoelastic damping is an important factor when designing MEMS resonators. Change design to minimize the effect of.Eigen Frequency Analysis with & without thermal stresses.Study the effect of thermal stress on resonant frequency. The Application Gallery features COMSOL Multiphysics® tutorial and demo app files pertinent to the electrical, structural, acoustics, fluid, heat, and chemical.

Comsol multiphysics tutorial fluid flow